Modification of zirconium oxide film microstructure during post-deposition annealing

Author: Ciosek J.   Paszkowicz W.   Pankowski P.   Firak J.   Stanislawek U.   Patron Z.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.72, Iss.2, 2003-10, pp. : 135-141

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