Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

Author: Yan J.   Syoji K.   Tamaki J.  

Publisher: Elsevier

ISSN: 0043-1648

Source: Wear, Vol.255, Iss.7, 2003-08, pp. : 1380-1387

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next