LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Author： Agouram S.   Bodart F.   Terwagne G.  

Publisher： Elsevier

ISSN： 0368-2048

Source： Journal of Electron Spectroscopy and Related Phenomena, Vol.134, Iss.2, 2004-02, pp. : 173-181

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