A mathematical model for silicon chlorination

Author: Seo E.S.M.   Brocchi E.A.   Carvalho R.J.   Soares E.P.   Andreoli M.  

Publisher: Elsevier

ISSN: 0924-0136

Source: Journal of Materials Processing Technology, Vol.141, Iss.3, 2003-11, pp. : 370-378

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next