Fabrication and characterization of SiO 2 microcantilever for microsensor application

Author: Tang Y.   Fang J.   Yan X.   Ji H.-F.  

Publisher: Elsevier

ISSN: 0925-4005

Source: Sensors and Actuators B: Chemical, Vol.97, Iss.1, 2004-01, pp. : 109-113

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