Tribological properties of DLC films deposited using various precursors under different humidity conditions

Author: Tanaka A.   Nishibori T.   Suzuki M.   Maekawa K.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 2066-2071

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