Roughness control of polycrystalline diamond films grown by bias-enhanced microwave plasma-assisted CVD

Author: Seo S.-H.   Lee T.-H.   Park J.-S.  

Publisher: Elsevier

ISSN: 0925-9635

Source: Diamond and Related Materials, Vol.12, Iss.10, 2003-10, pp. : 1670-1674

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