The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymers

Author： Sarantopoulou E.   Kollia Z.   Kocevar K.   Musevic I.   Kobe S.   Drazic G.   Gogolides E.   Argitis P.   Cefalas A.C.  

Publisher： Elsevier

ISSN： 0928-4931

Source： Materials Science and Engineering: C, Vol.23, Iss.6, 2003-12, pp. : 995-999

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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