Development of a large-area planar surface-wave plasma source with a cavity launcher driven by a 915 MHz UHF wave

Author： Chang Xijiang   Kunii Kazuki   Liang Rongqing   Nagatsu Masaaki  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.2, 2013-04, pp. : 25002-25008

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