Effect of non-Maxwellian electron energy distribution functions on the simulation of an inductively coupled Ar-Hg discharge

Author： Liu Yang   Zissis Georges   Chen Yuming  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.3, 2013-06, pp. : 35002-35012

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