Software support of the technology of substrates for multilayer interference structures

Author: Savel'ev I.   Savel'ev S.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 529-532

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Abstract