Improved near field lithography by surface plasmon resonance in groove-patterned masks

Author: Zeng Beibei   Pan Li   Liu Ling   Fang Liang   Wang Changtao   Luo Xiangang  

Publisher: IOP Publishing

ISSN: 1464-4258

Source: Journal of Optics A: Pure and Applied Optics, Vol.11, Iss.12, 2009-12, pp. : 125003-125007

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Abstract