Chemical Shift and Surface Characteristics of Al-Doped ZnO Thin Film on SiOC Dielectrics

Author: Oh Teresa   Lee Sang Yeol  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7202-7204

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