Effect of the Carrier Gas Flow Rate on the Microstructure Evolution and the Generation of the Charged Nanoparticles During Silicon Chemical Vapor Deposition

Author: Youn Woong-Kyu   Kim Chan-Soo   Hwang Nong-Moon  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7127-7130

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