Dispersion of Nanodiamond on Chemical Mechanical Polishing Performance for Ge 1 Sb 6 Te 3 Film

Author： Yang Il-Ho Song Min-Jung Shin Dong-Hee Lee Seung-Koo Hwang Eung-Rim Lim Dae-Soon

Publisher： American Scientific Publishers

ISSN： 1533-4899

Source： Journal of Nanoscience and Nanotechnology, Vol.13, Iss.9, 2013-09, pp. : 6353-6358

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