Electrical and Mechanical Characteristics of Room Temperature Deposited Silicon Nitride Using Two Inner Parallel Cylindrical Coils Inductively Coupled Plasma Chemical Vapor Deposition

Author： Kang Sungchil   Lee Hyun Woo   Hong Mun Pyo   Kwon Kwang-Ho  

Publisher： American Scientific Publishers

ISSN： 1533-4899

Source： Journal of Nanoscience and Nanotechnology, Vol.13, Iss.9, 2013-09, pp. : 6326-6332

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