The special features of adsorption and the kinetics of decomposition of monosilane molecules on the epitaxial surface of silicon

Author： Orlov L. Ivin S. Smyslova T.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1990-7931

Source： Russian Journal of Physical Chemistry B, Vol.5, Iss.1, 2011-02, pp. : 168-175

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