Constructing the OGE for promoting tool group productivity in semiconductor manufacturing

Author: Chien Chen-Fu   Chen Hsin-Kai   Wu Jei-Zheng   Hu Chih-Han  

Publisher: Taylor & Francis Ltd

ISSN: 0020-7543

Source: International Journal of Production Research, Vol.45, Iss.3, 2007-02, pp. : 509-524

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Abstract