An Inverse Problem in Periodic Diffractive Optics: Reconstruction of Lipschitz Grating Profiles

Author: Elschner J.  

Publisher: Taylor & Francis Ltd

ISSN: 0003-6811

Source: Applicable Analysis, Vol.81, Iss.6, 2002-01, pp. : 1307-1328

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Abstract

We consider the problem of recovering a two-dimensional periodic structure from scattered waves measured above the structure. Following an approach by Kirsch and Kress, this inverse problem is reformulated as a nonlinear optimization problem. We develop a theoretical basis for the reconstruction method in the case of an arbitrary Lipschitz grating profile. The convergence analysis is based on new perturbation and stability results for the forward problem.