Oxygen Gas Dependence of IGZO Thin Film for TFT Channel Layer

Author: Lee Kyu-Ho   Jung Yu-Sup   Kim Kyung-Hwan  

Publisher: Taylor & Francis Ltd

ISSN: 1542-1406

Source: Molecular Crystals and Liquid Crystals, Vol.550, Iss.1, 2011-11, pp. : 212-218

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Abstract