Submicron Channel Fabrication in Photoresist Film Using Continuous Wave Laser

Author: Tomiyasu Masateru   Egami Chikara  

Publisher: Taylor & Francis Ltd

ISSN: 1542-1406

Source: Molecular Crystals and Liquid Crystals, Vol.568, Iss.1, 2012-12, pp. : 66-69

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Abstract