Properties of titanium-tungsten thin films obtained by magnetron sputtering of composite cast targets

Author： Glebovsky V.G. Yaschak V.Y. Baranov V.V. Sackovich E.L. Yaschak V.Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.257, Iss.1, 1995-02, pp. : 1-6

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