Ion-beam-assisted deposition of Si-carbide films

Author: He Z.   Inoue S.   Carter G.   Kheyrandish H.   Colligon J.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.260, Iss.1, 1995-05, pp. : 32-37

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Abstract