Plasma-assisted deposition of tungsten-containing siloxane thin films

Author: Fracassi F.   d'Agostino R.   Palumbo F.   Bellucci F.   Monetta T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.264, Iss.1, 1995-08, pp. : 40-45

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Abstract