Preparation of c-axis oriented ZnO films by low-pressure organometallic chemical vapor deposition

Author： Kobayashi K.   Matsubara T.   Matsushima S.   Shirakata S.   Isomura S.   Okada G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.266, Iss.2, 1995-10, pp. : 106-109

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