Deposition of organic-inorganic composite thin films by Li 3 PO 4 sputtering and C 2 H 4 plasma polymerization

Author: Kwak B.S.   Zuhr R.A.   Bates J.B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.269, Iss.1, 1995-11, pp. : 6-13

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