HMDSO plasma polymerization and thin film optical properties

Author： Mota R.P.   Galvao D.   Durrant S.F.   De Moraes M.A.B.   Cantao M.   De Oliveira Dantas S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 109-113

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