Effect of ion irradiation on internal stress of amorphic carbon films produced by pulsed laser

Author: Kim W.M.   Lee S.K.   Cheong B.   Kim S.G.   Ro J.S.   Kim O.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 237-242

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Abstract