Growth mechanism of Si nodules on BPSG

Author: Noritake C.   Kondo I.   Kondo K.   Takenaka O.   Kinbara A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 445-449

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Abstract