A study of hillock formation on Al-Ta alloy films for interconnections of TFT-LCDs

Author： Iwamura E.   Ohnishi T.   Yoshikawa K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 450-455

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