Analysis of the oxidation kinetics and barrier layer properties of ZrN and Pt/Ru thin films for DRAM applications

Author： Al-Shareef H.N.   Chen X.   Lichtenwalner D.J.   Kingon A.I.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.280, Iss.1, 1996-07, pp. : 265-270

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