Structural, chemical, and electrical characterisation of reactively sputtered WS x thin films

Author: Regula M.   Ballif C.   Moser J.H.   Levy F.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.280, Iss.1, 1996-07, pp. : 67-75

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Abstract