Epitaxial growth of InSb films by r.f. magnetron sputtering

Author: Miyazaki T.   Kunugi M.   Kitamura Y.   Adachi S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.287, Iss.1, 1996-10, pp. : 51-56

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Abstract