Selective deposition of diamond onto Si substrates using tetraethylorthosilicate SiO 2 films as masks

Author： Sun Z.   He Y.   Xu C.   Wang X.   Zheng Z.   Sun Y.   Xu R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.289, Iss.1, 1996-11, pp. : 1-5

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