RTCVD growth and characterization of SiGeC multi-quantum wells

Author: Warren P.   Dutoit M.   Boucaud P.   Lourtioz J.-M.   Julien F.H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 125-128

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Abstract