Texture and stress profile in thick polysilicon films suitable for fabrication of microstructures

Author： Furtsch M.   Offenberg M.   Vila A.   Cornet A.   Morante J.R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.296, Iss.1, 1997-03, pp. : 177-180

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