The role of a thin amorphous silicon layer in the fabrication of micro-pored silicon

Author: Kyu Kim E.   Lee M.-S.   Chel Choi W.   Nyung Lee H.   Suk-Ki Min   Lyou J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.301, Iss.1, 1997-06, pp. : 188-191

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Abstract