Thin film characterization of diamond-like carbon films prepared by r.f. plasma chemical vapor deposition

Author： Hirakuri K.K.   Minorikawa T.   Friedbacher G.   Grasserbauer M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 5-11

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