Carbon nitride CN x film deposition assisted by IR laser ablation in a cold remote nitrogen plasma

Author: Jama C.   Rousseau V.   Dessaux O.   Goudmand P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.302, Iss.1, 1997-06, pp. : 58-65

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