High performance polysilicon thin film transistors by H 2 O plasma hydrogenation

Author： Lee K.Y. Fang Y.K. Chen C.W. Liang M.S. Wuu S.G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.305, Iss.1, 1997-08, pp. : 327-329

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