Crystallographic and morphological characterization of reactively sputtered Ta, Ta-N and Ta-N-O thin films

Author: Stavrev M.   Fischer D.   Wenzel C.   Drescher K.   Mattern N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.307, Iss.1, 1997-10, pp. : 79-88

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract