A study of the effects of annealing and outgassing on hydrogenated amorphous silicon

Author： Jennings P.J.   Cornish J.C.L.   Clare B.W.   Hefter G.T.   Santjojo D.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 156-160

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