Structures and vapor-sorption characteristics of sputtered polychlorotrifluoroethylene films treated by hydrogen-plasma

Author: Shimada R.   Kuwano H.   Nakamura M.   Sugimoto I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 303-309

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Abstract