Mechanical stability of DLC films on metallic substrates: Part I - Film structure and residual stress levels

Author: Clyne T.W.   Peng X.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 207-218

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract