Mechanical stress in micromachined components caused by humidity-induced in-plane expansion of thin polymer films

Author： Buchhold R. Nakladal A. Gerlach G. Sahre K. Eichhorn K.-J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 232-239

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