Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers

Author： Rajan N.   Zorman C.A.   Mehregany M.   DeAnna R.   Harvey R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 170-178

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