Epitaxial growth with phosphorus - 3. Formation of indium phosphide thin films using cyclohexylphosphine, (C 6 H 11 )PH 2 , as the organophosphorus source compound

Author: Glass J.A.   Spencer J.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 86-93

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