New transparent conducting ZnO-In 2 O 3 -SnO 2 thin films prepared by magnetron sputtering

Author： Minami T.   Kakumu T.   Shimokawa K.   Takata S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 318-321

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