Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings

Author: Lippens P.   Segers A.   Haemers J.   De Gryse R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 405-408

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Abstract