![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Ishii M. Iwai S. Ueki T. Aoyagi Y.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 6-10
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Atomic control of doping during SiGe epitaxy
By Tillack B.
Thin Solid Films, Vol. 318, Iss. 1, 1998-04 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)